DEFECT INSPECTION DEVICE, MANAGEMENT METHOD OF DEFECT INSPECTION DEVICE AND MANAGEMENT UNIT

摘要

PROBLEM TO BE SOLVED: To provide a management method of a defect inspection device capable of reliably discriminating signals which are obtained from a defect to be detected from noise components.SOLUTION: The management method of the defect inspection device includes the steps of: with respect to plural measurement points on a measuring object, generating a differential value between a signal acquired from an image of the measuring object and a signal acquired from a reference image (S14); generating a frequency distribution of the differential value (S15); and determining whether the frequency distribution satisfies a predetermined condition (S16).SELECTED DRAWING: Figure 4