| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface-emitting laser array capable of achieving both heat dissipation and corrosion resistance.SOLUTION: A surface-emitting laser array includes a plurality of light emitting parts. Each light emitting part includes a lower semiconductor DBR 103, an active layer 105, an upper semiconductor DBR 107, an upper electrode 113 surrounding an emission region of a laser beam, and the like, which are sequentially laminated on a substrate 101. The lower semiconductor DBR 103 includes AlGaAs (0.95<x≤1). The upper electrode 113 has a thickness of 2 μm or more, and covers also a region between light emitting parts in the plurality of light emitting parts.SELECTED DRAWING: Figure 4 |
