发明名称 METHOD FOR SHAPE CLASSIFICATION OF AN OBJECT
摘要 A method for shape classification of an object is provided. Shape categories are provided which specify a plane and points therein relative to the object, and also specify at least one limit coordinate for each such point, the limit coordinate defining a boundary in a direction normal to the plane for the shape of the object considered in order for the object to be classified into a respective shape category. The shape categories can be provided by a user, making the method very flexible. The shape categories can in particular be derived from a set of samples of objects representing a shape category to be defined. For classification, the position of a surface of the object is measured at each of the points defined in the shape category, and the result is compared with the corresponding limit coordinate.
申请公布号 WO2016153546(A1) 申请公布日期 2016.09.29
申请号 WO2015US45961 申请日期 2015.08.19
申请人 KLA-TENCOR CORPORATION 发明人 HERMANS, Laurent;DELFOSSE, Eric;NIJS, Frans;THISSEN, Francis;DE GREEVE, Johan
分类号 G06K9/48;G06K9/62 主分类号 G06K9/48
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