发明名称 |
METHOD FOR SHAPE CLASSIFICATION OF AN OBJECT |
摘要 |
A method for shape classification of an object is provided. Shape categories are provided which specify a plane and points therein relative to the object, and also specify at least one limit coordinate for each such point, the limit coordinate defining a boundary in a direction normal to the plane for the shape of the object considered in order for the object to be classified into a respective shape category. The shape categories can be provided by a user, making the method very flexible. The shape categories can in particular be derived from a set of samples of objects representing a shape category to be defined. For classification, the position of a surface of the object is measured at each of the points defined in the shape category, and the result is compared with the corresponding limit coordinate. |
申请公布号 |
WO2016153546(A1) |
申请公布日期 |
2016.09.29 |
申请号 |
WO2015US45961 |
申请日期 |
2015.08.19 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
HERMANS, Laurent;DELFOSSE, Eric;NIJS, Frans;THISSEN, Francis;DE GREEVE, Johan |
分类号 |
G06K9/48;G06K9/62 |
主分类号 |
G06K9/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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