发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 Provided is a semiconductor device which minimizes a distance between a channel and a contact formed on a source/drain area, and maintains the distance between the channel and the contact, thereby reducing a current crowding effect (CCE). The semiconductor device comprises: a substrate; a fin extended on the substrate in a lengthwise direction; a gate structure arranged on the fin, and intersecting with the fin; a spacer on a sidewall of a gate electrode; the source/drain area arranged in at least one side of the gate structure, arranged inside the fin, and including a first recess; and a silicide layer filling the first recess.
申请公布号 KR20160112891(A) 申请公布日期 2016.09.28
申请号 KR20150051674 申请日期 2015.04.13
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 BAE, DONG IL;KIM, BOM SOO;CHO, YONG MIN
分类号 H01L29/78;H01L21/3205;H01L29/66 主分类号 H01L29/78
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