发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME |
摘要 |
Provided is a semiconductor device which minimizes a distance between a channel and a contact formed on a source/drain area, and maintains the distance between the channel and the contact, thereby reducing a current crowding effect (CCE). The semiconductor device comprises: a substrate; a fin extended on the substrate in a lengthwise direction; a gate structure arranged on the fin, and intersecting with the fin; a spacer on a sidewall of a gate electrode; the source/drain area arranged in at least one side of the gate structure, arranged inside the fin, and including a first recess; and a silicide layer filling the first recess. |
申请公布号 |
KR20160112891(A) |
申请公布日期 |
2016.09.28 |
申请号 |
KR20150051674 |
申请日期 |
2015.04.13 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
BAE, DONG IL;KIM, BOM SOO;CHO, YONG MIN |
分类号 |
H01L29/78;H01L21/3205;H01L29/66 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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