发明名称 圧電素子、液体噴射ヘッド及び液体噴射装置
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of suppressing destruction of a piezoelectric layer at an end of a piezoelectric active part, and a liquid injection head and a liquid injection apparatus provided with it.SOLUTION: The piezoelectric element includes a first electrode 60, a second electrode 80, a piezoelectric layer 70 provided between the first electrode 60 and the second electrode 80, and a diaphragm 50 provided on the opposite side of the piezoelectric layer 70 of the first electrode 60. The piezoelectric layer 70 includes a piezoelectric active part 320 which is held between the first electrode 60 and the second electrode 80 and is to be practically a drive part, and the diaphragm 50 is made thicker at the end of the piezoelectric active part 320 than the other regions.
申请公布号 JP5999301(B2) 申请公布日期 2016.09.28
申请号 JP20120023538 申请日期 2012.02.06
申请人 セイコーエプソン株式会社 发明人 泉 秀登;羽廣 英樹
分类号 H01L41/09;H01L41/23 主分类号 H01L41/09
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