Phase-contrast electron microscope

摘要

The electron microscope has a diffraction lens (11) imaging a rear focal plane (10) of an objective lens (8) into a diffraction-intermediate image plane (21) in a magnified manner. Another diffraction lens has a main plane that is arranged in proximity of the diffraction-intermediate image plane. A phase shifting unit (16) is arranged in the diffraction-intermediate image plane or in the proximity of the diffraction-intermediate image plane. A beam deflection system e.g. double-deflection system, deflects an electron beam into two directions that are at right angles to each other.