发明名称 |
MEMS SENSOR WITH MOVABLE Z-AXIS SENSING ELEMENT |
摘要 |
A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure electrically coupled to the mass of the MEMS sensor. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement. |
申请公布号 |
EP2834650(B1) |
申请公布日期 |
2016.09.28 |
申请号 |
EP20130716596 |
申请日期 |
2013.03.27 |
申请人 |
ANALOG DEVICES, INC. |
发明人 |
ZHANG, XIN;JUDY, MICHAEL W. |
分类号 |
G01P15/125;B81B3/00;G01P15/08 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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