发明名称 圧力センサチップ
摘要 PROBLEM TO BE SOLVED: To seal a pressure transmission medium in a short time without generating residual air bubbles.SOLUTION: A fine gap 11-2d is formed that opens to part of a peripheral part 11-2a1 of a recess 11-2a of a stopper member 11-2 to be communicated with a pressure guide path 11-2e. A fine gap 11-3d is formed that opens to part of a peripheral part 11-3a1 of a recess 11-3a of a stopper member 11-3 to be communicated with a pressure guide path 11-3e. In the recess 11-2a, a pressure transmission medium S1 is filled with a pressure guide path 11-2b being an entrance side and a pressure guide path 11-2d being an outlet side. In the recess 11-3a, a pressure transmission medium S2 is filled with a pressure guide path 11-3b being an entrance side and a pressure guide path 11-3d being an outlet side.
申请公布号 JP5997594(B2) 申请公布日期 2016.09.28
申请号 JP20120263688 申请日期 2012.11.30
申请人 アズビル株式会社 发明人 田中 達夫;石倉 義之;東條 博史;徳田 智久;瀬戸 祐希
分类号 G01L13/02 主分类号 G01L13/02
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