| 摘要 |
A laser processing apparatus is provided with: a first optical system (100), including a first prism (101) and a second prism (102); a second optical system (200), including a third prism (201) and a fourth prism (202); a light collecting optical system (80) that collects and guides laser beams to a subject to be processed; a first drive apparatus (105), which rotates the first prism, and which also rotates the second prism in synchronization with the first prism; a second drive apparatus (205), which rotates the third prism, and which also rotates the fourth prism in synchronization with the third prism; and a control apparatus (24) that controls the first drive apparatus and the drive apparatus such that the subject to be processed is irradiated with the laser beams while the laser beams are circling. The control apparatus adjusts laser beam irradiation conditions, including input position and input angle of the laser beams with respect to the subject to be processed, by adjusting, in the rotating direction, relative positions of the first prism and the second prism, and relative positions of the third prism and the fourth prism, thereby processing the subject to be processed at high qualities and high accuracy. |
