摘要 |
PROBLEM TO BE SOLVED: To provide a laser scanning type microscope capable of acquiring a three-dimensional image by quantifying the information in the depth direction of an object and simultaneously acquiring quantified three-dimensional information even in the object having a height difference of a focus depth or more.SOLUTION: Light from a laser light source 1 passes through an acoustic optical modulation element 4, further passes through a first pupil transmitting magnifying lens system 5, etc., is sent to an objective lens 16, reflected by an object S, and returned. The reflected and returned light is received by light receiving elements 18 and 24, and a first data processing part 21 obtains the three-dimensional image in the focus depth of the objective lens 16, on the basis of the control signals of the acoustic optical modulation element 4, etc. and signals of intensity information and phase information. The three-dimensional image and three-dimensional position information obtained by a second data processing part 27 are processed in a third data processing part 31 and quantified in the depth direction with a resolution equivalent to that of a confocal laser scanning type microscope. |