| 摘要 |
A minor reflecting radiation with an operating wavelength of 5-30 nm, includes a substrate and a reflective coating. The reflective coating includes a first group of layers (19) and a second group (5) of layers, such that the second group of layers is arranged between the substrate and the first group of layers. The first group and the second group of layers comprise a plurality of first and second layers (9, 11). The first layers have a refractive index for radiation having the operating wavelength which is greater than a refractive index of the second layers for radiation having the operating wavelength. A correction layer (13) has a layer thickness variation for correcting the surface form of the minor and is arranged between the second group and the first group of layers. The correction layer contains carbon, sulfur, phosphorus, fluorine or organic compounds thereof, and inorganic metal compounds. |
