发明名称 プローブユニットおよび検査装置
摘要 PROBLEM TO BE SOLVED: To reliably cause a pair of probes to come into contact with a probing object.SOLUTION: A probe unit is configured such that base end parts 31 of a pair of parallely arranged probes 12 are connected in an insulation state and a tip end part 32 of each probe 12 can simultaneously come into contact with one probing object, and the probe 12 has a thin thickness part 33, which is thinner than other parts in the probe 12, formed between the base end part 31 and the tip end part 32, and is configured to be deformable with the thin thickness part 33 as a supporting point such that the tip end part 32 secedes from the tip end part 32 of the other probe 12.
申请公布号 JP6000046(B2) 申请公布日期 2016.09.28
申请号 JP20120220093 申请日期 2012.10.02
申请人 日置電機株式会社 发明人 友井 忠司
分类号 G01R31/26;G01R1/06;G01R1/073 主分类号 G01R31/26
代理机构 代理人
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