发明名称 |
SENSOR INCLUDING MOVING MASSES AND MEANS FOR DETECTING RELATIVE MOVEMENTS OF THE MASSES |
摘要 |
A MEMS type inertial sensor comprising a support structure having at least a first seismic body and a second seismic body connected thereto by resilient means in order to be movable in a suspension plane, transducers for maintaining the seismic bodies in vibration and for determining movements of the seismic bodies in the suspension plane, and a control unit connected to the transducers by electrical conductor means. The transducers comprise at least one electrode secured to the first seismic body and at least one electrode secured to the second seismic body, the two electrodes being arranged to enable relative movements of the seismic bodies relative to each other in the suspension plane to be measured directly. |
申请公布号 |
EP3071933(A1) |
申请公布日期 |
2016.09.28 |
申请号 |
EP20140802026 |
申请日期 |
2014.11.20 |
申请人 |
SAFRAN ELECTRONICS & DEFENSE |
发明人 |
JEANROY, ALAIN;ONFROY, PHILIPPE |
分类号 |
G01C19/574;B81B3/00;G01P15/097 |
主分类号 |
G01C19/574 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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