| 摘要 |
The present invention provides an inspection method for a substrate enclosure which is supplied with a plurality of slots in the vertical direction which support peripheral edges of substrates. The inspection method is supplied with steps for: mounting, which mounts the substrate enclosure on a platform; measurement, which moves a sensor horizontally, using a first arm mechanism, to a space in an empty slot that is adjacent to a slot to be measured, in which a substrate has been inserted, so as to measure the position of the substrate; and exchange, which extracts the substrate from the slot to be measured using a second arm mechanism in order to exchange the substrate into another of the slots. In the method, the measurement step and the exchange step are repeated until the measurement is completed for the plurality of slots. |
