发明名称 ダイ供給装置
摘要 PROBLEM TO BE SOLVED: To simplify replacement work of a push-up pot attached to a pot attachment part of a push-up mechanism in a die supply device.SOLUTION: A push-up pot 27 is replaceably engaged with and held on a pot attachment part 55 of a push-up mechanism 18 by a clamp mechanism 49. The push-up pot 27 comprises: a base member 41; and a pot body 43 which is assembled onto the base member 41 so as to move in a vertical direction in a state where the pot body 43 is biased upward by a disc spring washer 53. A stopper 45 for stopping upward movement of the pot body 43 at a position where an upper end surface of the pot body 43 contacts with a dicing sheet during push-up operation of the push-up pot 27 is provided in the pot body 43. The push-up pot 27 is engaged with and held on the pot attachment part 55 of the push-up mechanism 18 by the clamp mechanism 49 so as to be replaced with various kinds of other push-up pots respectively having at least pot bodies 43 of different diameters or push-up pins of different diameters.
申请公布号 JP6000322(B2) 申请公布日期 2016.09.28
申请号 JP20140244337 申请日期 2014.12.02
申请人 富士機械製造株式会社 发明人 水野 貴幸;吉野 朋治;水谷 大輔;村井 正樹
分类号 H01L21/67;H01L21/301;H01L21/52 主分类号 H01L21/67
代理机构 代理人
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