| 摘要 |
When a plurality of image-recognizable fiducial dies 45 are disposed at predetermined intervals in an arrangement of dies 31 on a dicing sheet 34, and an interval from a position of a die 31(a) which is subjected to a present adsorption operation to an estimated position for a next adsorption die 31(b) is equal to or greater than a predetermined value, in addition to recognizing the position for the next adsorption die 31(b), a fiducial die 45 adjacent to the next adsorption die 31(b) is selected from the plurality of fiducial dies 45, the fiducial die 45 is imaged by a camera 42, a position of the fiducial die 45 is recognized, and it is determined whether or not a recognition position for the next adsorption die 31 (b) is a proper position for a next adsorption die 31 (c) based on a positional relationship between a recognition position of the fiducial die 45 and the recognition position for the next adsorption die 31(b). When it is determined that the recognition position for the next adsorption die 31 (b) is not the proper position for the next adsorption die 31(c), the position of the die 31(c) to be adsorbed next is reestimated based on the recognition position of the fiducial die 45, the die 31(c) is imaged by the camera 42, the position of the die 31(c) is recognized, and push-up operation and adsorption operation are executed. |
