| 摘要 |
A design method of a tip shape of a cutting member includes a process of forming a groove on a front surface side on a front surface of a substrate, and a process of forming a groove on a rear surface side that communicates with the groove on the front surface side by a rotating cutting member that has a thickness larger than the width of the groove on the front surface side from a rear surface of the substrate and individualizing the substrate into semiconductor pieces. The design method includes a process of preparing plural cutting members having different degrees of taper in a tip portion thereof, a process of preparing plural grooves on the front surface side having the same shape, a process of confirming a breakage status when the groove on the rear surface side is formed by the plural cutting members, and a process of selecting, when it is confirmed that both of a cutting member that causes breakage and a cutting member that does not cause the breakage are included, the degree of taper of the cutting member that does not cause the breakage as a tip shape of a cutting member to be used in a mass production process. |
