发明名称 ワイヤソー装置及びこれを用いたウエハの製造方法
摘要 PROBLEM TO BE SOLVED: To provide a wire saw device which does not drop a wire engaged into an engaging groove when an auxiliary roller whose engaging groove is worn out is replaced.SOLUTION: A wire saw device has: main rollers 100 which are arranged in axial directions at a predetermined interval so that mutual axial directions become parallel with each other, and spiral wire engagement grooves are continuously formed; wires W which are engaged into the respective wire engaging grooves so that many pieces are bridged in parallel with one another between the respective main rollers and form a wire row by a plurality of wires W at predetermined intervals to one another between the respective main rollers; a wire feeding part and wire winding part 200 which feed and wind the wire; and an auxiliary roller 300 which is arranged between the wire feeding part and wire winding part 200 and the main rollers, and rotates at a state that the wire is hooked, when the auxiliary roller is replaced resulting from wear out of the wire engaging grooves near the auxiliary roller, a wire temporary placing roller 500 which temporarily places a wire at this part is provided in the vicinity of the auxiliary roller.
申请公布号 JP5996999(B2) 申请公布日期 2016.09.21
申请号 JP20120228434 申请日期 2012.10.15
申请人 株式会社安永 发明人 吉松 高弘
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
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