发明名称 |
PATTERN MATCHING USING A LAMELLA OF KNOWN SHAPE FOR AUTOMATED S/TEM ACQUISITION AND METROLOGY |
摘要 |
A method for automatically imaging in an electron microscope (SEM, TEM or STEM) features in a region of interest in a lamella without prior knowledge of the features to be imaged, thereby enabling multiple electron microscope images to be obtained by stepping from the first image location without requiring the use of image recognition of individual image features. By eliminating the need for image recognition, substantial increases in image acquisition rates may be obtained. |
申请公布号 |
EP3070731(A1) |
申请公布日期 |
2016.09.21 |
申请号 |
EP20150159132 |
申请日期 |
2015.03.16 |
申请人 |
FEI COMPANY |
发明人 |
PLACHINDA, PAUL;ZHANG, LIANG;ROLLER, JUSTIN |
分类号 |
H01J37/22;G06T1/00;H01J37/26 |
主分类号 |
H01J37/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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