| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing apparatus capable of reducing possibility of damaging a chuck table.SOLUTION: A processing apparatus includes a chuck table having a holding face for holding a workpiece, processing means for processing the workpiece held by the chuck table, and a cover member capable of being positioned in a cover position in which the cover member covers the holding face of the chuck table or in a receding position in which the cover member recedes from the cover position. |
