发明名称 半導体装置の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device in which field concentration just under an edge part of a LOCOS oxide film is easily alleviated, and which can achieve an excellent breakdown voltage and excellent resistance in a semiconductor layer just under the LOCOS oxide film.SOLUTION: A semiconductor device (1) has a profile in which at least a part (22a, 22b) of edges (22a, 22b) of a LOCOS oxide film (22), which terminate in a lateral direction with respect to a surface of a semiconductor substrate terminates by being sandwiched by a top face and an undersurface at an angle (&thetas;) of not less than 15 degrees and not more than 30 degrees.
申请公布号 JP5994238(B2) 申请公布日期 2016.09.21
申请号 JP20110258100 申请日期 2011.11.25
申请人 トヨタ自動車株式会社 发明人 富田 英幹
分类号 H01L21/316;H01L21/76;H01L21/762;H01L21/8234;H01L27/08;H01L27/088;H01L29/786 主分类号 H01L21/316
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