SEALED CART AND METHOD FOR TRANSFERRING WAFERS USING THE SAME

摘要

A sealed cart is docked in a stocker in which a storage tool storing a plurality of wafers is stored in a place where a process of manufacturing or inspecting semiconductor chips from the wafers is performed. Moreover, the sealed cart comprises: a sealed box having a sealed accommodating space in which the storage tool is accommodated; and a moving unit mounted in a lower portion of the sealed box to move the sealed box.