| 摘要 |
PROBLEM TO BE SOLVED: To certainly and quickly optimize pupil luminance distribution so as to obtain an image formation performance sufficiently similar to a desired image formation performance.SOLUTION: A method includes: a first step of deriving variation in an OPE value depending on minute change in a modulation parameter, for each parameter, with respect to referential pupil luminance distribution; a second step of obtaining the OPE value obtained by using the referential pupil luminance distribution as a target; a third step of deriving the pupil luminance distribution modulated so that the OPE value obtained at the second step approaches a target OPE value; a fourth step predicting the OPE value obtained by the modulated pupil luminance distribution derived at the third step; a fifth step of deriving the pupil luminance distribution modulated so that the predicted OPE value approaches the target OPE value; and a sixth step of predicting the OPE value obtained by the modulated pupil luminance distribution derived at the fifth step. The fifth step and the sixth step are repeated until a difference between the predicted OPE value and the target OPE value is within an allowable range. |
