DECOMPOSITION APPARATUS FOR NON-DEGRADABLE GAS ACCORDING TO THE PLASMA AND THE CATALYST

摘要

According to the present invention, disclosed is an apparatus to decompose non-degradable gas by plasma and a catalyst, capable of effectively decomposing non-degradable gas by plasma and a catalyst. According to the present invention, the apparatus comprises: a plasma decomposition apparatus to decompose non-degradable gas by generated plasma, or to change gas including the non-degradable gas into plasma to decompose the non-degradable gas, wherein the non-degradable gas is gas including fluorine; and a catalyst decomposition apparatus placed in a position where the non-degradable gas decomposed by the plasma decomposition apparatus is discharged, making heat of the discharged decomposed non-degradable gas and the plasma decomposition apparatus introduced to catalyst, and causing additional decomposition reaction by the catalyst while the introduced gas passes the catalyst.