INSPECTION APPARATUS AND INSPECTION METHOD

摘要

The present invention relates to an inspection apparatus and inspection method, which reduce a correction error to obtain an accurate line width error. The inspection apparatus (100) comprises a gray scale correction section (131) for correcting optical image data based on a variation of light dose of a light source (105); and a line width error acquiring section (119) for calculating the line width of a pattern from the optical image data after correction to obtain a line width error which is a difference between the line width of the patter and the line width of a pattern of reference image data corresponding to the optical image data. A TDI sensor (113) for transmission is provided with a first region to which the light transmitted through a mask (Ma) is input, and a second region to which the light emitted from the light source (105) and diverged from the light irradiating the mask (Ma) is input. The gray scale correction section (131) calculates a variance of the gray scale of the optical image data obtained from the light input to the second region and corrects the gray scale of the optical image data obtained from the light input to the first region.