| 摘要 |
An inner peripheral wall that fits slideably into an outer peripheral surface of an end portion of a supply air port member that is positioned on an output chamber side, and an exhaust introduction flow path for achieving a connection between the opening portion and the output chamber when the opening portion of the exhaust port a that faces the output chamber side is opened by a second valve unit of a poppet valve, are provided in an exhaust port member. Through this, the crosswise position of the exhaust port member (the crosswise position of the exhaust port) is constrained by the supply air port member, making it possible to control the self-induced vibration of the diaphragm without increasing the size of the poppet valve. Moreover, an adequate exhaust flow from the exhaust port is secured through the exhaust introduction flow path, enabling pressure adjustments to be carried out smoothly. |
