| 摘要 |
The purpose of the present invention is to provide a desmearing apparatus and a desmearing method, which are capable of reliably performing a desmearing process with high efficiency. In a desmearing method according to the present invention, a processing gas which contains an active species source that is to be activated by irradiation of vacuum ultraviolet light, and which is made to contain moisture is supplied into a processing space when a smear on an object to be processed, said object being arranged in the processing space, is removed by irradiating the object to be processed with vacuum ultraviolet light through an ultraviolet light-transmitting window member. This desmearing apparatus is provided with a processing gas supply means which has a humidification mechanism for having a processing gas, which contains an active species source that is to be activated by irradiation of vacuum ultraviolet light from an ultraviolet light source, contain moisture. |
