发明名称 HEATER AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR APPARATUS USING THE SAME
摘要 According to an embodiment of the present invention, a heater includes: a plane-shaped heating unit, a linear slit having one end unit formed on an outer perimeter of the heating unit and the other end unit formed within a front side of the heating unit, and which is arranged in a linear shape to be opened; a heater element which is continuously formed on the other end unit to be open, which has the opening diameter of a front side greater than the width of the linear slit, and which heats as applied with electric current; and a pair of electrodes which are connected to a side of the heater element and which are applied with voltage when applying electric current to the heater element.
申请公布号 KR20160110130(A) 申请公布日期 2016.09.21
申请号 KR20160026097 申请日期 2016.03.04
申请人 NUFLARE TECHNOLOGY INC. 发明人 FURUTANI HIROSHI;SATO YUUSUKE;SUZUKI KUNIHIKO
分类号 H01L21/324;H01L21/67;H01L21/677;H01L21/683;H01L21/687 主分类号 H01L21/324
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