| 主权项 |
1. A variable capacitance bank device, comprising:
a plurality of capacitor banks for generation of a variable capacitance, the plurality of capacitor banks being connected parallel, each of the capacitor banks comprising: a first lower electrode and a second lower electrode disposed on a substrate; a first driving electrode having a fixed first capacitance generated between the first driving electrode and the first lower electrode; a second driving electrode having a fixed second capacitance generated between the second driving electrode and the second lower electrode; and a common upper electrode disposed to be movable in a direction of facing the first and second lower electrodes, having a variable third capacitance generated between the common upper electrode and the first driving electrode, and having a variable fourth capacitance generated between the common upper electrode and the second driving electrode, a capacitance value between the first lower electrode and the second lower electrode being determined based on a value of a synthetic capacitance obtained by serially connecting the first, second, third and fourth capacitances, the value of the synthetic capacitance being used as the variable capacitance, the first and second capacitances being set at an equal capacitance value CM in a same capacitor bank, and set at different capacitance values in different capacitor banks, the third and fourth capacitances being set at a same capacitance value CS in the same capacitor bank, and set at the same capacitance value CS in the different capacitor banks. |
