MEASUREMENT FOR TRANSISTOR OUTPUT CHARACTERISTICS WITH AND WITHOUT SELF HEATING

摘要

A method of measuring semiconductor output characteristics is provided that includes connecting a pulse generator to the gate structure of a semiconductor device, and applying a plurality of voltage pulses at least some of which having a different pulse width to the gate structure of the semiconductor device. The average current is measured from the drain structure of the device for a duration of each pulse of the plurality of pulses. From the measured values for the average current, a self-heating curve of the average current divided by the pulse width is plotted as a function of the pulse width. The self-heating curve is then extrapolated to a pulse width substantially equal to zero to provide a value of drain current measurements without self-heating effects.

主权项

1. A method of measuring semiconductor output characteristics comprising:
applying a plurality of sets of repetitive pulses of voltage to a gate structure of a semiconductor device with a pulse generator, wherein a repeated pulse width of at least one of said sets of said plurality of repetitive pulses of voltage is different from a repeated pulse width in a remainder of said plurality of sets of repetitive pulses of voltage that is applied to the gate structure; measuring average current from a drain region of the semiconductor device for a duration of each of said plurality of said set of repetitive pulses of voltage applied to the gate structure; plotting a self-heating curve of the average current as a function of the pulse width; and extrapolating the self-heating curve to a value for the average current when the pulse width is substantially equal to zero to provide a value of drain current measurement without self-heating effects.