SENSOR AND SENSOR SYSTEM

摘要

According to one embodiment, a sensor includes a substrate, a first MEMO element provided on the substrate, a cap layer providing a cavity for accommodating the first MEMS element, and a second MEMS element for monitoring a pressure in the cavity, the second MEMS element being provided on the substrate in the cavity.

主权项

1. A sensor comprising:
a substrate; a first MEMS element provided on the substrate; a cap layer provided on the substrate and the first MEMS element to provide a cavity accommodating the first MEMS element; and a second MEMS element for monitoring a pressure in the cavity, the second MEMS element being provided on the substrate in the cavity.