| 摘要 |
During the drive of a stage (WST), positional information in a movement plane of the stage (WST) is measured by three encoders (Enc1, Enc2, and Enc3) that include at least one each of an X encoder and a Y encoder of an encoder system, and a controller switches the encoders used for a measurement of positional information of the stage (WST) in the movement plane from the encoders (Enc1, Enc2, and Enc3) to encoders (Enc4, Enc2, and Enc3) so that the position of the stage (WST) in the movement plane is maintained before and after the switching. Therefore, although the switching of the encoders used for controlling the position of the stage is performed, the position of the stage in the movement plane is maintained before and after the switching, and a correct linkage becomes possible. |
