发明名称 IMPROVED ILLUMINATION MODULE FOR A METROLOGY SENSOR, IN PARTICULAR A COORDINATE MEASURING MACHINE
摘要 The present invention relates to an illumination module (24) for a metrology sensor, in particular a coordinate measuring device, for measuring a workpiece (18) by means of an optical sensor (22), wherein the illumination module (24) comprises a base body (61) with a sensor side (62) and a workpiece side (64), wherein the illumination module (24) comprises on the base body (61) at least one illumination arrangement (88, 104, 106) for illuminating the workpiece (18), wherein the at least one illumination arrangement (88, 104, 106) has a radiation characteristic (126, 160) with an angle of radiation (130) and a first light intensity path (126) in a first plane (162) within the angle of radiation (130), and wherein the radiation characteristic (126, 160) further comprises a second light intensity path (160) in a second plane (164) within the angle of radiation (130). In addition, the first light intensity path (126) of the at least one illumination arrangement (88, 104, 106) is asymmetrical within the first plane (162), wherein the second light intensity path (160) of the at least one illumination arrangement (88, 104, 106) is asymmetric within the second plane (164).
申请公布号 EP3066415(A1) 申请公布日期 2016.09.14
申请号 EP20140799687 申请日期 2014.11.04
申请人 CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH 发明人 ENGEL, THOMAS;DEGEN, ARTUR;BERNER, ANDREA;HAVERKAMP, NILS
分类号 G01B11/00 主分类号 G01B11/00
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