| 摘要 |
PROBLEM TO BE SOLVED: To suppress deterioration of characteristics while keeping a manufacturing procedure.SOLUTION: A plurality of irradiation devices 14 that irradiates laser of a small spot diameter with a low laser output are provided, the plurality of irradiation devices 14 are used to simultaneously irradiate laser so that laser processing can be performed to one processed range 15 by scanning plural times, and deterioration of characteristics can be suppressed while avoiding a longer procedure. |
