| 摘要 |
An actuator as a piezoelectric device has a bonding layer (24) including titanium (Ti), a lower electrode (25) including platinum (Pt), a piezoelectric thin film (26), and an upper electrode formed in this order on a substrate. Ti particles (24a) precipitate from the bonding layer (24) onto the lower electrode (25). Pt that forms the lower electrode (25) has a crystal grain size of 75 nm to 150 nm. |
