| 摘要 |
PROBLEM TO BE SOLVED: To provide a glass powder material usable for overcoating of a substrate placement table in manufacturing processes for liquid crystal display, organic EL display and semiconductor, and to provide a method of forming a porous film.SOLUTION: There is provided at least one glass powder material selected from a group comprising BiO-based glass, PbO-based glass, SiO-BO-RO-based glass (R=Li, Na, K), PO-based glass, VO-based glass, and BO-ZnO-based glass, the glass powder material having a mean particle size of 10-30 μm and a maximum particle size of 300 μm or less, and depositing a film on a substrate by a thermal spraying method or spraying method. |
