发明名称 防塵膜の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a highly productive dustproof film manufacturing method in which dustproof films with antireflection performance and excellent transmittance over a wide region of wavelengths on which foreign objects hardly stick can be obtained and the area can be increased.SOLUTION: The method for manufacturing dustproof films comprises: a mold fabrication step of fabricating a reeled resin mold (12) provided with a base material (11) and a cured resin layer (14) having a fine uneven structure on the surface thereof; a resin cast fabrication step of fabricating a resin cast (15) provided with a cured resin layer (18) onto which the fine uneven structure of the reeled resin mold (12) is transferred; an uncured dustproof film material layer formation step of forming an uncured dustproof film material layer (19) on the cured resin layer (18); and a dustproof film peeling step of curing the uncured dustproof film material layer (19) to manufacture a dustproof film (20). The ratio of fluorine element concentration (Es) in the surface portion of the cured resin layer (18) to average fluorine element concentration (Eb) in the cured resin layer (18) is within a prescribed range.
申请公布号 JP5990411(B2) 申请公布日期 2016.09.14
申请号 JP20120131850 申请日期 2012.06.11
申请人 旭化成株式会社 发明人 伊藤 隆一;古池 潤;山口 布士人
分类号 G03F1/62;B29C59/02;H01L21/027 主分类号 G03F1/62
代理机构 代理人
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