发明名称 シリカチタニアガラスの製造方法及びシリカチタニアガラスの選別方法
摘要 PROBLEM TO BE SOLVED: To provide a silica-titania glass having a long-term durability in which densification upon X-ray irradiation is particularly suppressed and a method for producing the same.SOLUTION: A method for producing a silica-titania glass comprising: a) a step of synthesizing a silica-titania glass containing 5 to 9 wt% of TiOfrom a Si raw material and a Ti raw material; b) a step of heating the silica-titania glass obtained in the step a) at the temperature of higher than 2150°C; and c) a step of annealing the silica-titania glass obtained in the step b) at 700 to 1300°C, in which a tensile-stress F in a test sample of the silica-titania glass after the step c) partially irradiated with X-ray generated under specific condition caused between irradiation-area and non-irradiaition area is within a range of F<0.06×C(TiO)...(1) [C(TiO) represents TiOconcentration (wt%)].
申请公布号 JP5992842(B2) 申请公布日期 2016.09.14
申请号 JP20130011359 申请日期 2013.01.24
申请人 信越石英株式会社;信越化学工業株式会社 发明人 上田 哲司;江崎 正信;毎田 繁;大塚 久利
分类号 C03B20/00;C03B32/00;C03C3/06;G03F1/60;G03F1/84;H01L21/027 主分类号 C03B20/00
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