发明名称 |
DICING-SHEET SUBSTRATE FILM AND DICING SHEET |
摘要 |
A dicing sheet base film (2) includes a resin layer (A). The resin layer (A) contains: a polyethylene (a1) that has a density of 0.900 g/cm 3 or more; and a styrene-based elastomer (a2). The polyethylene (a1) has a content of 50 mass% or more and 90 mass% or less to a total resin component contained in the resin layer (A), while the styrene-based elastomer (a2) has a content of 10 mass% or more and 50 mass% or less to the total resin component. The dicing sheet base film (2) suppresses the occurrence of dicing debris during the dicing of a cut object without imparting physical energy such as electron rays and ³ rays, and has sufficient expandability in the expanding process. |
申请公布号 |
EP2940716(A4) |
申请公布日期 |
2016.09.14 |
申请号 |
EP20130867972 |
申请日期 |
2013.10.09 |
申请人 |
LINTEC CORPORATION |
发明人 |
TAYA NAOKI;UEDA MASASHI;ITO MASAHARU |
分类号 |
H01L21/683;B32B27/08;C08J5/18;C09J7/02 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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