发明名称 DICING-SHEET SUBSTRATE FILM AND DICING SHEET
摘要 A dicing sheet base film (2) includes a resin layer (A). The resin layer (A) contains: a polyethylene (a1) that has a density of 0.900 g/cm 3 or more; and a styrene-based elastomer (a2). The polyethylene (a1) has a content of 50 mass% or more and 90 mass% or less to a total resin component contained in the resin layer (A), while the styrene-based elastomer (a2) has a content of 10 mass% or more and 50 mass% or less to the total resin component. The dicing sheet base film (2) suppresses the occurrence of dicing debris during the dicing of a cut object without imparting physical energy such as electron rays and ³ rays, and has sufficient expandability in the expanding process.
申请公布号 EP2940716(A4) 申请公布日期 2016.09.14
申请号 EP20130867972 申请日期 2013.10.09
申请人 LINTEC CORPORATION 发明人 TAYA NAOKI;UEDA MASASHI;ITO MASAHARU
分类号 H01L21/683;B32B27/08;C08J5/18;C09J7/02 主分类号 H01L21/683
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