发明名称 ARRANGEMENT FOR ALIGNING A MEASURED OBJECT WITH A DETECTOR, INTERFEROMETRIC ARRANGEMENT, AND ALIGNMENT METHOD
摘要 The invention relates to an arrangement for aligning a measured object (2) with a detector (5), said arrangement comprising illumination means (10) producing an illumination beam path (15) and used to illuminate the object (2) to be measured, and adjusting means (8) used to adjust the position of the object (2) to be measured in relation to the detector (5). According to the invention, the illumination means (10) comprise at least two individually controllable partial illumination means (12, 13).
申请公布号 EP2283304(B1) 申请公布日期 2016.09.14
申请号 EP20090737962 申请日期 2009.04.01
申请人 ROBERT BOSCH GMBH 发明人 FLEISCHER, MATTHIAS
分类号 G01B9/02 主分类号 G01B9/02
代理机构 代理人
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