| 摘要 |
PROBLEM TO BE SOLVED: To provide an art for a guide member which is provided on a holding member of a substrate transport mechanism, for limiting a peripheral end of a substrate to enable highly accurate alignment when adjusting a position of the substrate in a radial direction.SOLUTION: An adjustment tool for adjusting a position of a substrate on a guide member in a radial direction of the substrate against a substrate transport mechanism in which the guide member for limiting a peripheral end of the substrate when the substrate is held is provided on a holding member of the substrate comprises: a tool body; a fixing part for fixing the tool body to the holding member; and a positioning mechanism provided on the tool body, for positioning the guide member by being relatively pressed to the guide member in the radial direction of the substrate. |
