| 摘要 |
PROBLEM TO BE SOLVED: To provide a light irradiation device employing a microwave electrodeless lamp in which the temperature on an outer circumferential surface of the electrodeless lamp can be made uniform along a circumferential direction and further, when exchanging the electrodeless lamp, the outer circumferential surface is prevented from being contaminated by an alkali component or the like.SOLUTION: The light irradiation device comprises: a microwave oscillator; an antenna attached to the microwave oscillator; an electrodeless lamp which emits light by receiving microwave energy from the antenna; a reflecting mirror having an elliptic or parabolic surface shape for controlling light emitted from the electrodeless lamp; a rectangular casing; and a cooling air blowing duct mounted to the casing. The electrodeless lamp includes a discharging container and protrusions in both ends of the discharging container, rotary blades are mounted to the protrusions and cooling air supplied from the cooling air blowing duct collides with the rotary blades, thereby rotating the electrodeless lamp around a center axis. |
