摘要 |
Provided are a manufacturing method of catalyst-free substrate grown graphene, catalyst-free substrate grown graphene, and a manufacturing apparatus thereof. The manufacturing method of catalyst-free substrate grown graphene comprises the following steps of: (a) arranging a substrate having a substrate layer; (b) supplying carbon-containing gas, and conducting low-pressure chemical vapor deposition (LPCVD); and (c) growing graphene on the substrate layer without having a catalyst layer. |