PELLICLE FRAME AND PROCESS FOR MANUFACTURING SAME

摘要

Provided is a pellicle frame that can prevent generation of haze and reduces a surface glittering defect under irradiation with collectedlight, and a method of manufacturing the same. Thepellicle frame is obtained by using an aluminum frame material having a structure satisfying predetermined conditions on the circle-equivalent diameters of a Mg 2 Si crystallized product, an Al 2 CuMg crystallized product, an Al-Fe-based crystallized product (Al m Fe or Al 7 Cu 2 Fe), and an Al 2 CuMg crystallized product and on the area ratios of those crystallized products each having a circle-equivalent diameter of 1 µm or more, and in addition, subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing as an electrolyte a predetermined organic acid salt. In addition, the method of manufacturing a pellicle frame includes: preparing an aluminum frame material having a structure as described above; and subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing a predetermined organic acid salt, to form an anodic oxide film.