LASER OPTICAL SYSTEM AND LASER ANNEALING DEVICE INCLUDING THE SAME

摘要

The present invention discloses a laser optical system. The laser optical system includes a light division unit which reflects and transmits part of a laser beam to divide a laser beam into a first beam as a transmitted beam and a second beam as reflected beam; a first reflection member which is arranged on a traveling progress path of the first beam and reflects the first beam; and a second reflection member which is arranged on the traveling path of the first beam reflected on the first reflection member, and reflects the first beam to project the first beam to the light division unit. Part of the first beam projected by the light division unit transmits the light division unit. At least part of the first beam overlaps the second beam. So, the uniformity of beam shape can be improved.