| 摘要 |
The invention relates to a capacitive sensor element comprising a carrier (12), which has a capacitor electrode (14) and a reference electrode (16) electrically isolated therefrom, and furthermore a membrane (18), which can be deflected in some regions and which has a deflection region (18a) that acts as a capacitor counter-electrode and an edge region (18b), wherein the membrane is fastened to a fastening section (20), for example a circumferential fastening section, on the carrier (12), and wherein the capacitor electrode (14) and the capacitor counter-electrode (18a) form the measuring capacitance Cmess. The reference electrode (16) forms the reference capacitance Cref at least with a section of the edge region (18b) of the membrane (18) that acts as as a reference counter-electrode, the capacitance value of which reference capacitance reproduces at least a component of a disturbing influence Cpar acting on the measuring capacitance Cmess. |
