发明名称 LAMINATE, ORGANIC-SEMICONDUCTOR MANUFACTURING KIT, AND RESIST COMPOSITION FOR MANUFACTURING ORGANIC SEMICONDUCTOR
摘要 Provided are a laminate which is capable of forming an excellent organic semiconductor pattern, a kit for manufacturing an organic semiconductor, which is used to manufacture such a laminate, and a resist composition for manufacturing an organic semiconductor, which is used for the kit for manufacturing an organic semiconductor. The laminate includes an organic semiconductor film, a protective film on the organic semiconductor film, and a resist film on the protective film, in which the resist film is formed of a photosensitive resin composition that contains a photoacid generator (A) which generates an organic acid of which a pKa of the generated acid is -1 or less and a resin (B) which reacts with an acid generated by the photoacid generator so that the rate of dissolution in a developer containing an organic solvent is decreased.
申请公布号 EP3064997(A1) 申请公布日期 2016.09.07
申请号 EP20140857368 申请日期 2014.10.29
申请人 FUJIFILM CORPORATION 发明人 MIZUTANI KAZUYOSHI;IWAI YU;KOYAMA ICHIRO;KAMOCHI YOSHITAKA
分类号 G03F7/038;B32B27/00;G03F7/004;G03F7/039;G03F7/11;H01L21/027;H01L21/3065 主分类号 G03F7/038
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