发明名称 リニア駆動を利用した極低温冷凍機
摘要 A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.
申请公布号 JP5990235(B2) 申请公布日期 2016.09.07
申请号 JP20140208337 申请日期 2014.10.09
申请人 ブルックス オートメーション インコーポレイテッド 发明人 モリス・ロナルド・エヌ;アンディーン・ブルース・アール;バートレット・アレン・ジェイ
分类号 F25B9/14;F25B9/10 主分类号 F25B9/14
代理机构 代理人
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