| 摘要 |
PROBLEM TO BE SOLVED: To provide a silica particle that hardly releases α rays, has excellent dispersibility in resin, and can be contained in a semiconductor mounting paste.SOLUTION: The present invention relates to a silica particle in which the ratio of uranium mass to silicon oxide mass (in terms of SiO) is 2 ppb or less (U/SiO), the ratio of thorium mass to silicon oxide mass (in terms of SiO) is 2 ppb or less (Th/SiO), the ratio of alkali metal element mass to silicon oxide mass (in terms of SiO) is 10-1000 ppm (alkali metal element/SiO), and an average particle diameter measured by a dynamic light scattering method is 10 nm-10 μm. |
