| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporator that improves maintainability of a mask and does not impair deposition quality.SOLUTION: An evaporator 100 that is arranged in a vacuum tank with its longitudinal direction being horizontal and deposits a material to be evaporated on a continuously supplied belt-shaped film includes: an open crucible 101 that melts an evaporation source; a cylinder-based heating chamber 102 that lies in a laid position and houses the crucible; and a plurality of rod-shaped heaters 131 that are arranged outside the heating chamber and parallel to an axis of the heating chamber. The heating chamber is provided with a mounting port 121 which has a substantially rectangular shape long in one direction and whose side surface is formed to rise outward from a position notched parallel to the axis. The evaporator 100 further includes: a mask 141 that is long in one direction and detachably mounted to the mounting port, and has a slit 144 formed in the longitudinal direction to blow out an evaporated material; and a heater 132 for the mask that is disposed immediately below or in the mask to heat the mask to a re-evaporation temperature or more.SELECTED DRAWING: Figure 3 |
